“oxygen Plasma Cleaner” (40KHz/13.56MHz) (100W/300W/500W/1000W)

Technical parameters:

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Chamber material : High purity quartz

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Chamber size : Diameter 150 mm; Length 270 mm

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RF power supply

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Power supply features

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The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.

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Power advantage

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1. Long time normal operation. 2. Simple and flexible operation. 3. High power supply efficiency and low heat generation. 4. With perfect reflection power protection function.

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RF power: 0~100W/300W/500W/1000W continuously adjustable

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RF connector : N type connector

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Signal frequency : 40KHz/13.56MHz ±0.005%

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Machine efficiency : ≥75%

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Reflected power : ≤100W

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Harmonic component : ≤-50 dB

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Power stability : ±0.1%

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cooling method : Forced air cooling

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Gas measurement : Measuring unit

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Float flowmeter :

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A channel range :10～ 100ml

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Gas channel :Two channels

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B channel range :16～ 160ml

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Vacuum Measurement : Digital vacuum gauge (resistance gauge) display on HMI

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Motor noise :≤56dB

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Vacuum pump : Two-stage rotary vane vacuum pump

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Pipe interface :

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Gas inlet: KF16 exhaust port KF16

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Motor Power : 230V 50 Hz: Single Phase

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Connecting pipe :KF16 vacuum bellows

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Pumping rate : 50 Hz: 15m3/hr; 250 LPM

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Vacuum valve : Solenoid valve

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Vacuum range : 0.001mbar～1024 mbar

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Motor Power : 400W

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Ultimate vacuum : 0.001 mbar

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Other 

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Power supply : AC220V 50/60Hz

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Working vacuum : ≤40Pa

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Total power : 550W/600W

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Overall size : 600mm×500mm×560mm

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Operating temperature : -10℃ - 40℃

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Total Weight : 80kg (with packaging)