Nst Organic and Inorganic Evaporation Coater

1 Piece (MOQ)

Business Type Manufacturer, Exporter, Supplier
Brand Name NST
Country of Origin India
Ultimate Pressure ≤2.0×10-5 Pa
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Preferred Buyer From

Location Anywhere in India

Product Details

Vacuum Recovery Time
Reach 1×10-4 Pa in 40 Mins
Baking Device
A Method of Baking in a Vacuum Outdoor Baking Strip
Payment Terms
L/C, T/T, Western Union

ORGANIC AND INORGANIC EVAPORATION COATER adopts linear structure and is mainly composed of two organic material growth chambers which are connected by gate valves. One of the two growth Chambers is reserved for the butt joint interface with the glove box, which can complete the transfer of substrates between two independent film preparation systems. The organic material growth chamber mainly consists of vacuum chamber assembly, organic evaporation source, thermal resistance evaporation boat, sample transfer device, sample platform, film thickness monitor, vacuum chamber lighting device, baking device and so on.

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Technical Specifications

Vacuum chamber Two D-shaped vacuum chamber, size: aboutΦ450×H750; Two   vacuum chamber of the vacuum system configuration, extreme pressure, vacuum   recovery time, thermal resistance evaporation boat and power supply, the film   thickness monitor, vacuum chamber lighting equipment, baking equipment,   sample platform configuration , The above configuration is the same as the   technical parameters
Vacuum system configuration Japanese cryopump, oil-free vortex dry pump and electromagnetic valve, compound digital-displayed vacuum measurement auge and meter, valves etc.
Ultimate pressure ≤2.0×10-5 Pa
vacuum recovery time Reach 1×10-4 Pa in 40 mins
Electric magnetic coupling sample transfer   device Vacuum chamber 1 It adopts magnetic coupling line motion   delivering device and is driven by stepper motor, It is equipped with remote   manual control box to control straight forward and backward
Organic evaporation source and power Vacuum chamber 1 9 new model OEL sublimation evaporation   source, each filled with 10CC evaporation material, room temperature-800℃: 7;   room temperature-1000℃: 2; evaporation source power: 4
Vacuum chamber 2 6 new model OEL sublimation evaporation   source, each filled with 10CC evaporation material, room temperature-800℃: 6; room temperature-1000℃: 2; evaporation source power: 4
Heat resistance evaporation boat and power New model evaporation boat: 2 (heat   resistance evaporation boat); digital heat resistance evaporation power: 1,   with fine adjustment function (0.1A); aluminum coated special purpose box   evaporation boat: 2; metal evaporation boat: 10; evaporation source baffle:   2.
Film thickness monitor Thickness resolution ratio Non-uniformity: 0.0133Å/measure; 50 samples   average: 0.002Å/measure
Velocity resolution ratio Non-uniformity: 0.0133angstrom per second;   50 samples average: 0.02 angstrom per second
Precision 0.03HZ/measure, 2ppm
Speed Measuring 10 times per second
Vacuum chamber lighting device LED lighting outside chamber, to prevent film coating contaminate lighting
Baking device A method of baking in a vacuum outdoor   baking strip
Sample table Sample size Load one 100×100mm or 50×50mm substrate
Mode of motion Power driven lifting, rotatable, rotating speed 0-30rpm, rotating speed adjustable

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